Continuous Improvements and Future Challenges of Air Pollution Control at an Advanced Semiconductor Fab
Abstract This study reviews the air pollution control strategy at an advanced semiconductor fab focusing on its continuous improvements and future challenges. A wide range of air pollutants is emitted from various sources classified as organic solvents, corrosive, toxic and combustible gases. This e...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer
2023-04-01
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| Series: | Aerosol and Air Quality Research |
| Subjects: | |
| Online Access: | https://doi.org/10.4209/aaqr.230034 |
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