Experimental study on the damage characteristics of sol-gel antireflection coatings on large-aperture optical components by in-situ plasma cleaning
Low-pressure plasma cleaning technology is currently regarded as a highly promising method for the effective in-situ removal of surface contaminants from large-aperture optical components (LAOC) (⩾430 mm) in laser fusion facilities. After a long cleaning, irreversible damage can occur to the sol-gel...
Saved in:
| Main Authors: | , , , , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2025-01-01
|
| Series: | Nuclear Fusion |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/1741-4326/adaed2 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1825206525437673472 |
|---|---|
| author | Rongqi Shen Yuhai Li Zixu Wang Laixi Sun Xiaodong Yuan Xiang Dong Xia Xiang Bo Li Xujie Liu Xueshi Xu Tingting Wang Qingshun Bai |
| author_facet | Rongqi Shen Yuhai Li Zixu Wang Laixi Sun Xiaodong Yuan Xiang Dong Xia Xiang Bo Li Xujie Liu Xueshi Xu Tingting Wang Qingshun Bai |
| author_sort | Rongqi Shen |
| collection | DOAJ |
| description | Low-pressure plasma cleaning technology is currently regarded as a highly promising method for the effective in-situ removal of surface contaminants from large-aperture optical components (LAOC) (⩾430 mm) in laser fusion facilities. After a long cleaning, irreversible damage can occur to the sol-gel antireflective (AR) coatings on the surface of the LAOCs. Hence, a study was conducted to analyze the surface damage characteristics of low-pressure plasma cleaning on optical components and implement in-situ plasma cleaning techniques in the laser fusion facility. Initially, the impact of organic contaminant levels on the performance of optical components was assessed by experiments. Subsequently, the correlation between plasma cleaning duration, transmittance, wavelength peak, and laser-induced damage threshold of sol-gel antireflection coating on the LAOCs was examined. Experimental findings from plasma cleaning trials revealed that prolonged plasma exposure had a cumulative detrimental influence on coating thickness and optical performance, gradually increasing surface pores. Ultimately, investigating the surface damage mechanism of sol-gel AR coatings during low-pressure plasma cleaning establishes a groundwork for achieving non-destructive in-situ cleaning of LAOCs in laser fusion facilities. |
| format | Article |
| id | doaj-art-eb779b54f7a248e19255a306c9505bfe |
| institution | Kabale University |
| issn | 0029-5515 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | IOP Publishing |
| record_format | Article |
| series | Nuclear Fusion |
| spelling | doaj-art-eb779b54f7a248e19255a306c9505bfe2025-02-07T09:02:14ZengIOP PublishingNuclear Fusion0029-55152025-01-0165303600210.1088/1741-4326/adaed2Experimental study on the damage characteristics of sol-gel antireflection coatings on large-aperture optical components by in-situ plasma cleaningRongqi Shen0https://orcid.org/0000-0002-4785-0622Yuhai Li1https://orcid.org/0000-0001-5427-876XZixu Wang2Laixi Sun3Xiaodong Yuan4Xiang Dong5Xia Xiang6https://orcid.org/0000-0002-4042-1016Bo Li7Xujie Liu8Xueshi Xu9Tingting Wang10Qingshun Bai11https://orcid.org/0000-0002-8626-4431School of Mechanical and Electronic Engineering, Nanjing Forestry University , Nanjing 210042, ChinaLaser Fusion Research Center, China Academy of Engineering Physics , Mianyang 621900, ChinaInstitute of General Engineering , China Academy of Engineering Physics, Mianyang 621999, ChinaLaser Fusion Research Center, China Academy of Engineering Physics , Mianyang 621900, ChinaLaser Fusion Research Center, China Academy of Engineering Physics , Mianyang 621900, ChinaSchool of Physics, University of Electronic Science and Technology of China , Chengdu 610054, ChinaSchool of Physics, University of Electronic Science and Technology of China , Chengdu 610054, ChinaSchool of Physics, University of Electronic Science and Technology of China , Chengdu 610054, ChinaSchool of Mechatronics Engineering, Harbin Institute of Technology , Harbin 150000, ChinaSchool of Mechatronics Engineering, Harbin Institute of Technology , Harbin 150000, ChinaSchool of Mechatronics Engineering, Harbin Institute of Technology , Harbin 150000, ChinaSchool of Mechatronics Engineering, Harbin Institute of Technology , Harbin 150000, ChinaLow-pressure plasma cleaning technology is currently regarded as a highly promising method for the effective in-situ removal of surface contaminants from large-aperture optical components (LAOC) (⩾430 mm) in laser fusion facilities. After a long cleaning, irreversible damage can occur to the sol-gel antireflective (AR) coatings on the surface of the LAOCs. Hence, a study was conducted to analyze the surface damage characteristics of low-pressure plasma cleaning on optical components and implement in-situ plasma cleaning techniques in the laser fusion facility. Initially, the impact of organic contaminant levels on the performance of optical components was assessed by experiments. Subsequently, the correlation between plasma cleaning duration, transmittance, wavelength peak, and laser-induced damage threshold of sol-gel antireflection coating on the LAOCs was examined. Experimental findings from plasma cleaning trials revealed that prolonged plasma exposure had a cumulative detrimental influence on coating thickness and optical performance, gradually increasing surface pores. Ultimately, investigating the surface damage mechanism of sol-gel AR coatings during low-pressure plasma cleaning establishes a groundwork for achieving non-destructive in-situ cleaning of LAOCs in laser fusion facilities.https://doi.org/10.1088/1741-4326/adaed2low-pressure plasmalarge-aperture optical componentin-situ cleaningsol-gel antireflective coatingsnano-porosity defects |
| spellingShingle | Rongqi Shen Yuhai Li Zixu Wang Laixi Sun Xiaodong Yuan Xiang Dong Xia Xiang Bo Li Xujie Liu Xueshi Xu Tingting Wang Qingshun Bai Experimental study on the damage characteristics of sol-gel antireflection coatings on large-aperture optical components by in-situ plasma cleaning Nuclear Fusion low-pressure plasma large-aperture optical component in-situ cleaning sol-gel antireflective coatings nano-porosity defects |
| title | Experimental study on the damage characteristics of sol-gel antireflection coatings on large-aperture optical components by in-situ plasma cleaning |
| title_full | Experimental study on the damage characteristics of sol-gel antireflection coatings on large-aperture optical components by in-situ plasma cleaning |
| title_fullStr | Experimental study on the damage characteristics of sol-gel antireflection coatings on large-aperture optical components by in-situ plasma cleaning |
| title_full_unstemmed | Experimental study on the damage characteristics of sol-gel antireflection coatings on large-aperture optical components by in-situ plasma cleaning |
| title_short | Experimental study on the damage characteristics of sol-gel antireflection coatings on large-aperture optical components by in-situ plasma cleaning |
| title_sort | experimental study on the damage characteristics of sol gel antireflection coatings on large aperture optical components by in situ plasma cleaning |
| topic | low-pressure plasma large-aperture optical component in-situ cleaning sol-gel antireflective coatings nano-porosity defects |
| url | https://doi.org/10.1088/1741-4326/adaed2 |
| work_keys_str_mv | AT rongqishen experimentalstudyonthedamagecharacteristicsofsolgelantireflectioncoatingsonlargeapertureopticalcomponentsbyinsituplasmacleaning AT yuhaili experimentalstudyonthedamagecharacteristicsofsolgelantireflectioncoatingsonlargeapertureopticalcomponentsbyinsituplasmacleaning AT zixuwang experimentalstudyonthedamagecharacteristicsofsolgelantireflectioncoatingsonlargeapertureopticalcomponentsbyinsituplasmacleaning AT laixisun experimentalstudyonthedamagecharacteristicsofsolgelantireflectioncoatingsonlargeapertureopticalcomponentsbyinsituplasmacleaning AT xiaodongyuan experimentalstudyonthedamagecharacteristicsofsolgelantireflectioncoatingsonlargeapertureopticalcomponentsbyinsituplasmacleaning AT xiangdong experimentalstudyonthedamagecharacteristicsofsolgelantireflectioncoatingsonlargeapertureopticalcomponentsbyinsituplasmacleaning AT xiaxiang experimentalstudyonthedamagecharacteristicsofsolgelantireflectioncoatingsonlargeapertureopticalcomponentsbyinsituplasmacleaning AT boli experimentalstudyonthedamagecharacteristicsofsolgelantireflectioncoatingsonlargeapertureopticalcomponentsbyinsituplasmacleaning AT xujieliu experimentalstudyonthedamagecharacteristicsofsolgelantireflectioncoatingsonlargeapertureopticalcomponentsbyinsituplasmacleaning AT xueshixu experimentalstudyonthedamagecharacteristicsofsolgelantireflectioncoatingsonlargeapertureopticalcomponentsbyinsituplasmacleaning AT tingtingwang experimentalstudyonthedamagecharacteristicsofsolgelantireflectioncoatingsonlargeapertureopticalcomponentsbyinsituplasmacleaning AT qingshunbai experimentalstudyonthedamagecharacteristicsofsolgelantireflectioncoatingsonlargeapertureopticalcomponentsbyinsituplasmacleaning |