A Systematic Literature Review of Cleanroom Ventilation and Air Distribution Systems

Abstract Cleanroom ventilation systems are well-established; however, the advantages and limitations of current practices need to be examined and explained further. This study begins by looking over the history of cleanroom ventilation systems that creates the basis for understanding ventilation rat...

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Main Authors: Arup Bhattacharya, Mohammad Saleh Nikoopayan Tak, Shervin Shoai-Naini, Fred Betz, Ehsan Mousavi
Format: Article
Language:English
Published: Springer 2023-05-01
Series:Aerosol and Air Quality Research
Subjects:
Online Access:https://doi.org/10.4209/aaqr.220407
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author Arup Bhattacharya
Mohammad Saleh Nikoopayan Tak
Shervin Shoai-Naini
Fred Betz
Ehsan Mousavi
author_facet Arup Bhattacharya
Mohammad Saleh Nikoopayan Tak
Shervin Shoai-Naini
Fred Betz
Ehsan Mousavi
author_sort Arup Bhattacharya
collection DOAJ
description Abstract Cleanroom ventilation systems are well-established; however, the advantages and limitations of current practices need to be examined and explained further. This study begins by looking over the history of cleanroom ventilation systems that creates the basis for understanding ventilation rate specifications, terminologies employed in ventilation effectiveness, and recognizing scientific studies that correlate ventilation effectiveness with air change rates. This systematic review includes a comprehensive summary that contains a set of historical data and evidence that may be used to specify ventilation requirements in cleanrooms. Scientific articles are classified in terms of laboratory experiments, simulations/numerical analysis, or hybrid. HVAC designers and operators can use published codes and guidelines more efficiently if the terminology is properly understood and the design solutions are easy to implement. The present study aims to provide a deep insight into understanding the role of ventilation on the transport mechanisms of unwanted particles in cleanrooms. Historically, the ventilation rate is typically over-estimated, based on the experience of the designer, to ensure indoor air quality and thermal performance. However, the excess rate significantly impacts the system’s energy consumption. Hence, it is crucial to investigate existing recommendations to ensure if they have a scientific basis or could be proven theoretically before further implementations. Besides, any possible risks and influences associated with the traditional methods must be assessed to guarantee the facility’s performance, sustainability, and energy efficiency.
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institution Kabale University
issn 1680-8584
2071-1409
language English
publishDate 2023-05-01
publisher Springer
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series Aerosol and Air Quality Research
spelling doaj-art-f31b3a5822d94abcadb8f771160e6afd2025-02-09T12:22:17ZengSpringerAerosol and Air Quality Research1680-85842071-14092023-05-0123712110.4209/aaqr.220407A Systematic Literature Review of Cleanroom Ventilation and Air Distribution SystemsArup Bhattacharya0Mohammad Saleh Nikoopayan Tak1Shervin Shoai-Naini2Fred Betz3Ehsan Mousavi4Bert S. Turner Department of Construction Management, College of EngineeringNieri Family Department of Construction Development, and Planning, College of Architecture, Arts and HumanitiesProterra IncorporationAffiliate Engineers IncorporationNieri Family Department of Construction Development, and Planning, College of Architecture, Arts and HumanitiesAbstract Cleanroom ventilation systems are well-established; however, the advantages and limitations of current practices need to be examined and explained further. This study begins by looking over the history of cleanroom ventilation systems that creates the basis for understanding ventilation rate specifications, terminologies employed in ventilation effectiveness, and recognizing scientific studies that correlate ventilation effectiveness with air change rates. This systematic review includes a comprehensive summary that contains a set of historical data and evidence that may be used to specify ventilation requirements in cleanrooms. Scientific articles are classified in terms of laboratory experiments, simulations/numerical analysis, or hybrid. HVAC designers and operators can use published codes and guidelines more efficiently if the terminology is properly understood and the design solutions are easy to implement. The present study aims to provide a deep insight into understanding the role of ventilation on the transport mechanisms of unwanted particles in cleanrooms. Historically, the ventilation rate is typically over-estimated, based on the experience of the designer, to ensure indoor air quality and thermal performance. However, the excess rate significantly impacts the system’s energy consumption. Hence, it is crucial to investigate existing recommendations to ensure if they have a scientific basis or could be proven theoretically before further implementations. Besides, any possible risks and influences associated with the traditional methods must be assessed to guarantee the facility’s performance, sustainability, and energy efficiency.https://doi.org/10.4209/aaqr.220407CleanroomVentilationVentilation requirementsAir change rate
spellingShingle Arup Bhattacharya
Mohammad Saleh Nikoopayan Tak
Shervin Shoai-Naini
Fred Betz
Ehsan Mousavi
A Systematic Literature Review of Cleanroom Ventilation and Air Distribution Systems
Aerosol and Air Quality Research
Cleanroom
Ventilation
Ventilation requirements
Air change rate
title A Systematic Literature Review of Cleanroom Ventilation and Air Distribution Systems
title_full A Systematic Literature Review of Cleanroom Ventilation and Air Distribution Systems
title_fullStr A Systematic Literature Review of Cleanroom Ventilation and Air Distribution Systems
title_full_unstemmed A Systematic Literature Review of Cleanroom Ventilation and Air Distribution Systems
title_short A Systematic Literature Review of Cleanroom Ventilation and Air Distribution Systems
title_sort systematic literature review of cleanroom ventilation and air distribution systems
topic Cleanroom
Ventilation
Ventilation requirements
Air change rate
url https://doi.org/10.4209/aaqr.220407
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