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    Reduction of absorption of Ta2O5 monolayers through the suppression of structural defects by employing an appropriate ionic oxygen concentration

    Reduction of absorption of Ta2O5 monolayers through the suppression of structural defects by employing an appropriate ionic oxygen concentration by Lin Wang, Weili Zhang, Ruijin Hong, Kun Wang, Menglei Wang, Qinmin Wang, Kui Yi, Jianda Shao

    Published 2025-02-01
    Subjects: “…Ion-assisted deposition (IAD)…”
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