Reduction of absorption of Ta2O5 monolayers through the suppression of structural defects by employing an appropriate ionic oxygen concentration

Reduction of absorption of Ta2O5 monolayers through the suppression of structural defects by employing an appropriate ionic oxygen concentration

Abstract Ultralow-absorption laser films have critical applications in high-power continuous-laser and gravitational-wave-detection systems. During film deposition, the ionic oxygen concentration significantly affects the absorption loss of the film. In this study, Ta2O5 monolayers were deposited us...

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Bibliographic Details
Main Authors: Lin Wang, Weili Zhang, Ruijin Hong, Kun Wang, Menglei Wang, Qinmin Wang, Kui Yi, Jianda Shao
Format: Article
Language:English
Published: Nature Portfolio 2025-02-01
Series:Scientific Reports
Subjects:
Ion-assisted deposition (IAD)
Ta2O5 films
Absorption loss
Ionic oxygen concentration
Online Access:https://doi.org/10.1038/s41598-025-86151-3
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